Capillary-type

Mass Flow Meters and Controllers

Sierra's capillary-type devices measure and control the mass flow rate of clean process gases without temperature and pressure corrections. This product line features a patented cleanable sensor that is clog-resistant, easy to maintain and reduces process downtime.

101 Micro-Trak NEW

Smart stainless steel Mass Flow Controller /Meter series 0.1 to 4 sccm

100 -M Smart-Trak

Smart stainless steel Mass Flow Controller /Meter series 0-200slpm

100 -S Smart-Trak

Smart stainless steel Mass Flow Controller /Meter series 0-50slpm

810 Mass-Trak

Low-Cost Mass Flow Controller with Built-In Setpoint Control

820 Top-Trak

Low-Cost Mass Flow Meter for Non-Corrosive Gases

820-S Top-Trak

Mass Flow Meter for Corrosive and Toxic Gases

830/840 Side-Trak

High-Performance Mass Flow Meters and Controllers for All Clean Gases - low pressure drop.

800 Series Brochure

High performance Mass Flow Meters and Controllers Brochure

900 Power Supply and Electronic Readouts

Designed to use with your Series 800 Meters and Controllers