Industrial Mass Flow Meters
Series 760S/780S UHP Thermal Mass Flowmeters
Designed and built to meet Ultra High Purity standards!
The Series 760UHP-S and 780UHP-S mass flow meters are the instruments of choice for gas distribution service in semiconductor fabs, pharmaceutical production and other ultra-clean processes. Real-time monitoring of gas usage provides reliable information on consumption and usage patterns in the manufacturing area, to be used for both billing and diagnostic purposes. The Ultra High Purity meters are constructed of 316L electropolished tubing with a 7-10 Ra or 20-25 Ra interior finish.
Download 760/780S Data Sheet









